JPH0176031U - - Google Patents
Info
- Publication number
- JPH0176031U JPH0176031U JP1987171838U JP17183887U JPH0176031U JP H0176031 U JPH0176031 U JP H0176031U JP 1987171838 U JP1987171838 U JP 1987171838U JP 17183887 U JP17183887 U JP 17183887U JP H0176031 U JPH0176031 U JP H0176031U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- lens barrel
- vacuum chamber
- beam direct
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 238000013016 damping Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171838U JPH0176031U (en]) | 1987-11-09 | 1987-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171838U JPH0176031U (en]) | 1987-11-09 | 1987-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0176031U true JPH0176031U (en]) | 1989-05-23 |
Family
ID=31463843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171838U Pending JPH0176031U (en]) | 1987-11-09 | 1987-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0176031U (en]) |
-
1987
- 1987-11-09 JP JP1987171838U patent/JPH0176031U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6127590U (ja) | レ−ザ光線遮蔽板 | |
| JPH0176031U (en]) | ||
| JPH03128943U (en]) | ||
| JPS6016998U (ja) | セラミツク焼成用治具 | |
| JPH025754U (en]) | ||
| JPH0330425U (en]) | ||
| JPH0258860U (en]) | ||
| JPS62151736U (en]) | ||
| JPH01140866U (en]) | ||
| JPS60171446U (ja) | レ−ザ光線の照射ノズル | |
| JPS6298300U (en]) | ||
| JPH03124599U (en]) | ||
| JPH0397939U (en]) | ||
| JPS60192445U (ja) | ウエハ−チヤツク | |
| JPS6382943U (en]) | ||
| JPH0467738U (en]) | ||
| JPH0276688U (en]) | ||
| JPS5966853U (ja) | 面積走査角度走査両用電子線走査型分析装置 | |
| JPH0353828U (en]) | ||
| JPS6387759U (en]) | ||
| JPS6169824U (en]) | ||
| JPH01171487U (en]) | ||
| JPS63170837U (en]) | ||
| JPH0385635U (en]) | ||
| JPH0294250U (en]) |